✦ LIBER ✦
A comparison between micromachined pressure sensors using quartz or silicon vibrating beams
✍ Scribed by M. Dufour; M.T. Delaye; F. Michel; J.S. Danel; B. Diem; G. Delapierre
- Publisher
- Elsevier Science
- Year
- 1992
- Tongue
- English
- Weight
- 817 KB
- Volume
- 34
- Category
- Article
- ISSN
- 0924-4247
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