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A silicon micromachined flow sensor using thermopiles for heat transfer measurements

✍ Scribed by Oda, S.; Anzai, M.; Uematsu, S.; Watanabe, K.

Book ID
114629389
Publisher
IEEE
Year
2003
Tongue
English
Weight
443 KB
Volume
52
Category
Article
ISSN
0018-9456

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Silicon based flow sensors used for mean
Silicon based flow sensors used for mean velocity and turbulence measurements
✍ L. LΓΆfdahl; G. Stemme; B. Johansson πŸ“‚ Article πŸ“… 1992 πŸ› Springer 🌐 English βš– 770 KB

Small and directional sensitive silicon based sensors for velocity measurements have been designed and fabricated using microelectronic technology. Single-chip as well as double-chip sensors for the determination of mean velocity and turbulent stresses have been developed. To determine the performan