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A silicon bidirectional flow sensor for measuring respiratory flow

✍ Scribed by van Putten, M.J.A.M.; van Putten, M.H.P.M.; van Putten, A.F.P.; Pompe, J.C.; Bruining, H.A.

Book ID
114530196
Publisher
IEEE
Year
1997
Tongue
English
Weight
123 KB
Volume
44
Category
Article
ISSN
0018-9294

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Silicon based flow sensors used for mean
Silicon based flow sensors used for mean velocity and turbulence measurements
✍ L. LΓΆfdahl; G. Stemme; B. Johansson πŸ“‚ Article πŸ“… 1992 πŸ› Springer 🌐 English βš– 770 KB

Small and directional sensitive silicon based sensors for velocity measurements have been designed and fabricated using microelectronic technology. Single-chip as well as double-chip sensors for the determination of mean velocity and turbulent stresses have been developed. To determine the performan