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MOSFET scaling into the 10 nm regime

✍ Scribed by Leland Chang; Chenming Hu

Book ID: 102620286
Publisher: Elsevier Science
Year: 2000
Tongue: English
Weight: 144 KB
Volume: 28
Category: Article
ISSN: 0749-6036
DOI: 10.1006/spmi.2000.0933

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