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Silicon Device Scaling to the Sub-10-nm Regime

✍ Scribed by Meikei Ieong; Bruce Doris; Jakub Kedzierski; Ken Rim; Min Yang

Book ID: 101970452
Publisher: John Wiley and Sons
Year: 2005
Weight: 8 KB
Volume: 36
Category: Article
ISSN: 0931-7597
DOI: 10.1002/chin.200511247

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