The fluence effect in hydrogen-ion cleaving of silicon at the sub-100-nm scale

✍ Scribed by O. Moutanabbir; B. Terreault; M. Chicoine; F. Schiettekatte

• Publisher: Springer
• Year: 2004
• Tongue: English
• Weight: 842 KB
• Volume: 80
• Category: Article
• ISSN: 1432-0630
• DOI: 10.1007/s00339-004-3094-z