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Hydrogen/Deuterium-defect complexes involved in the ion cutting of Si (0 0 1) at the sub-100 nm scale

✍ Scribed by O. Moutanabbir; B. Terreault; M. Chicoine; P.J. Simpson; T. Zahel; G. Hobler

Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 731 KB
Volume: 376-377
Category: Article
ISSN: 0921-4526
DOI: 10.1016/j.physb.2005.12.011

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Hydrogen/Deuterium-defect complexes involved in the ion cutting of Si (0&#xa0;0&#xa0;1) at the sub-100&#xa0;nm scale

Hydrogen/Deuterium-defect complexes involved in the ion cutting of Si (0 0 1) at the sub-100 nm scale