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Morphology of sic epitaxial layers grown by temperature gradient zone melting (I). Dependence of the crystallization boundary smoothness on the epitaxial layers growth conditions

✍ Scribed by Dr. N. S. Peev; Prof. Dr. Yu. M. Tairov; Dr. N. A. Smirnova; Dr. A. A. Kalnin

Publisher: John Wiley and Sons
Year: 1987
Tongue: English
Weight: 383 KB
Volume: 22
Category: Article
ISSN: 0232-1300
DOI: 10.1002/crat.2170220607

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