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Morphology of SiC epitaxial layers grown by temperature gradient zone melting (III). Polytypical non-uniformity

โœ Scribed by N. S. Peev


Publisher
John Wiley and Sons
Year
1987
Tongue
English
Weight
174 KB
Volume
22
Category
Article
ISSN
0232-1300

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Liquid phase epitaxy of SiC in the syste
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Liquid Phase Epihxy of Sic in the System Tb-Si-Sic by Temperature Gradient Zone Melting (111) ## Epitaxial Layer Properties I n the present work the electrophysical and structural properties of tlie RiC epitaxial layers grown by the temperature gradient 70118 melting method in vacuum conditions i