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Morphological and structural study of plasma deposited fluorocarbon films at different thicknesses

✍ Scribed by Cicala, G; Milella, A; Palumbo, F; Favia, P; d'Agostino, R

Book ID
123296486
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
444 KB
Volume
12
Category
Article
ISSN
0925-9635

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