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Moisture absorption studies of fluorocarbon films deposited from pentafluoroethane and octafluorocyclobutane plasmas

✍ Scribed by Ravindra V. Tanikella; Sairam Agraharam; Sue A. Bidstrup Allen; Dennis W. Hess; Paul A. Kohl

Book ID: 107452747
Publisher: Springer US
Year: 2002
Tongue: English
Weight: 241 KB
Volume: 31
Category: Article
ISSN: 0361-5235
DOI: 10.1007/s11664-002-0048-0

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