✦ LIBER ✦
Plasma deposition of fluorocarbon thin films from c-C[sub 4]F[sub 8] using pulsed and continuous rf excitation
✍ Scribed by Labelle, Catherine B.; Opila, Robert; Kornblit, Avi
- Book ID
- 121845468
- Publisher
- AVS (American Vacuum Society)
- Year
- 2005
- Tongue
- English
- Weight
- 479 KB
- Volume
- 23
- Category
- Article
- ISSN
- 0734-2101
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