Overhang Test Structure Deposition Profiles of Pulsed Plasma Fluorocarbon Films from Hexafluoropropylene Oxide, 1,1,2,2-Tetrafluorethane, and Difluoromethane

Surface morphology of PECVD fluorocarbon

Surface morphology of PECVD fluorocarbon thin films from hexafluoropropylene oxide, 1,1,2,2-tetrafluoroethane, and difluoromethane

✍ Catherine B. Labelle; Karen K. Gleason 📂 Article 📅 1999 🏛 John Wiley and Sons 🌐 English ⚖ 277 KB

Atomic force microscopy (AFM) measurements have been made on a series of fluorocarbon films deposited from pulsed plasmas of hexafluoropropylene oxide (HFPO), 1,1,2,2-tetrafluoroethane (C 2 H 2 F 4 ), and difluoromethane (CH 2 F 2 ). All of the films give images showing nodular growth (cauliflower-l