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Electrical and structural studies of plasma-polymerized fluorocarbon films

✍ Scribed by Amyot, N.; Klemberg-Sapieha, J.E.; Wertheimer, M.R.; Segui, Y.; Moisan, M.


Book ID
114533062
Publisher
IEEE
Year
1992
Tongue
English
Weight
546 KB
Volume
27
Category
Article
ISSN
0018-9367

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## AC electrical properties of the dielectric part-hard hydrocarbon plasma polymer C: H of the composite Ag/C: H prepared by an unbalanced magnetron were investigated. Capacitance and dielectric losses tg 6 of the C: H film sandwiched between the two Al thin film electrodes and measured without brea