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Chamberless plasma polymerization of fluorocarbon thin films

✍ Scribed by Chun Huang; Chi-Hung Liu; Wen-Tung Hsu; Ta-Hsin Chou

Book ID: 116672394
Publisher: Elsevier Science
Year: 2010
Tongue: English
Weight: 574 KB
Volume: 356
Category: Article
ISSN: 0022-3093
DOI: 10.1016/j.jnoncrysol.2010.07.021

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