Electrical properties of plasma-polymerized C:H films

✍ Scribed by V Stundžia; P Bílková; H Biederman; D Slavínská; P Hlídek

• Publisher: Elsevier Science
• Year: 1998
• Tongue: English
• Weight: 300 KB
• Volume: 50
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/s0042-207x(98)00007-4

✦ Synopsis

AC electrical properties of the dielectric part-hard hydrocarbon plasma polymer C: H of the composite Ag/C: H prepared by an unbalanced magnetron were investigated. Capacitance and dielectric losses tg 6 of the C: H film sandwiched between the two Al thin film electrodes and measured without breaking vacuum at a single frequency (1592 Hz) decreased considerably with time. In addition ac conductivity of the C: H film within 10 min after its deposition

was measured in the frequency range 10-10" Hz. An explanation in terms of post deposition trapped free radical reactions resulting in their decay is given. This is supported by FTIR absorption measurements.