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Monte Carlo simulation of ions in a magnetron plasma

✍ Scribed by Goeckner, M.J.; Goree, J.A.; Sheridan, T.E., Jr.

Book ID: 117861968
Publisher: IEEE
Year: 1991
Tongue: English
Weight: 798 KB
Volume: 19
Category: Article
ISSN: 0093-3813
DOI: 10.1109/27.106828

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