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The metal flux from a rotating cylindrical magnetron: a Monte Carlo simulation

✍ Scribed by Van Aeken, K; Mahieu, S; Depla, D

Book ID: 121407456
Publisher: Institute of Physics
Year: 2008
Tongue: English
Weight: 499 KB
Volume: 41
Category: Article
ISSN: 0022-3727
DOI: 10.1088/0022-3727/41/20/205307

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