✦ LIBER ✦

A Monte Carlo simulation model for plasma source ion implantation

✍ Scribed by Wang, Dezhen; Ma, Tengcai; Gong, Ye

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Parallelization of a Monte Carlo ion imp

✍ Hossinger, A.; Langer, E.; Selberherr, S. 📂 Article 📅 2000 🏛 IEEE 🌐 English ⚖ 252 KB

Monte Carlo simulation of silicon amorph

✍ Bohmayr, W.; Burenkov, A.; Lorenz, J.; Ryssel, H.; Selberherr, S. 📂 Article 📅 1998 🏛 IEEE 🌐 English ⚖ 245 KB

Monte Carlo simulation of ions in a magn

✍ Goeckner, M.J.; Goree, J.A.; Sheridan, T.E., Jr. 📂 Article 📅 1991 🏛 IEEE 🌐 English ⚖ 798 KB

Defect distribution in ion-implanted sil

✍ Mazzone, A. M. 📂 Article 📅 1986 🏛 John Wiley and Sons 🌐 English ⚖ 369 KB

On smoothing three-dimensional Monte Car

✍ Heitzinger, C.; Hossinger, A.; Selberherr, S. 📂 Article 📅 2003 🏛 IEEE 🌐 English ⚖ 688 KB

Electronic stopping power for Monte Carl

✍ E. Morvan; P. Godignon; S. Berberich; M. Vellvehi; J. Millán 📂 Article 📅 1999 🏛 Elsevier Science 🌐 English ⚖ 308 KB