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Electronic stopping power for Monte Carlo simulation of ion implantation into SiC

✍ Scribed by E. Morvan; P. Godignon; S. Berberich; M. Vellvehi; J. Millán


Book ID
114170526
Publisher
Elsevier Science
Year
1999
Tongue
English
Weight
308 KB
Volume
147
Category
Article
ISSN
0168-583X

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