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A computationally efficient simulator for three-dimensional Monte Carlo simulation of ion implantation into complex structures

✍ Scribed by Di Li; Geng Wang; Yang Chen; Li Lin; Gaurav Shrivastav; Stimit Oak; Al Tasch; Sanjay Banerjee; Borna Obradovic

Book ID
114164996
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
635 KB
Volume
184
Category
Article
ISSN
0168-583X

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