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A Computationally Efficient Simulator for Three-Dimensional Monte Carlo Simulation of Ion Implantation into Complex Structures

✍ Scribed by Di Li; Geng Wang; Yang Chen; Li Lin; Gaurav Shrivastav; Stimit Oak; Al F. Tasch; Sanjay K. Banerjee

Book ID
110400285
Publisher
Springer
Year
2002
Tongue
English
Weight
451 KB
Volume
1
Category
Article
ISSN
1569-8025

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