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On smoothing three-dimensional Monte Carlo ion implantation simulation results

✍ Scribed by Heitzinger, C.; Hossinger, A.; Selberherr, S.

Book ID
118698407
Publisher
IEEE
Year
2003
Tongue
English
Weight
688 KB
Volume
22
Category
Article
ISSN
0278-0070

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An algorithm for smoothing three-dimensi
An algorithm for smoothing three-dimensional Monte Carlo ion implantation simulation results
✍ Clemens Heitzinger; Andreas HΓΆssinger; Siegfried Selberherr πŸ“‚ Article πŸ“… 2004 πŸ› Elsevier Science 🌐 English βš– 323 KB

We present an algorithm for smoothing results of three-dimensional Monte Carlo ion implantation simulations and translating them from the grid used for the Monte Carlo simulation to an arbitrary unstructured three-dimensional grid. This algorithm is important for joining various simulations of semic