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Monte Carlo simulations of ion-assisted selectivedeposition

✍ Scribed by C. Nender; S. Berg; J.P. Biersack

Book ID: 114085779
Publisher: Elsevier Science
Year: 1990
Tongue: English
Weight: 261 KB
Volume: 193-194
Category: Article
ISSN: 0040-6090
DOI: 10.1016/s0040-6090(05)80006-9

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