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Monte Carlo simulation of a control for cathodic sputtering

✍ Scribed by Andreas Mohnke

Book ID: 118767641
Publisher: John Wiley and Sons
Year: 2010
Tongue: English
Weight: 498 KB
Volume: 3
Category: Article
ISSN: 0947-076X
DOI: 10.1002/vipr.2230030311

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