✦ LIBER ✦

Monte Carlo simulation of thermalization process of sputtered particles

✍ Scribed by T. Motohiro; Y. Taga

Book ID: 118984915
Publisher: Elsevier Science
Year: 1983
Tongue: English
Weight: 297 KB
Volume: 134
Category: Article
ISSN: 0039-6028
DOI: 10.1016/0039-6028(83)90304-7

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