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A Monte Carlo simulation of angular distribution in low energy sputtering

✍ Scribed by Zheng Li-Ping; Cui Fu-Zhai


Publisher
Elsevier Science
Year
1989
Tongue
English
Weight
204 KB
Volume
39
Category
Article
ISSN
0042-207X

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A new Monte-Carlo program for simulation of low energy electron scattering in solids is presented. Applications to electron microscopy and electron microprobe analysis are discussed. Elastic interactions are described by Mott cross sections within the framework of partial wave analysis (PWA) whereas