Monte-Carlo Simulation of Low Energy Electron Scattering in Solids

✍ Scribed by Kuhr, J.-Ch. ;Fitting, H.-J.

• Publisher: John Wiley and Sons
• Year: 1999
• Tongue: English
• Weight: 535 KB
• Volume: 172
• Category: Article
• ISSN: 0031-8965
• DOI: 10.1002/(sici)1521-396x(199904)172:2<433::aid-pssa433>3.0.co;2-x

✦ Synopsis

A new Monte-Carlo program for simulation of low energy electron scattering in solids is presented. Applications to electron microscopy and electron microprobe analysis are discussed. Elastic interactions are described by Mott cross sections within the framework of partial wave analysis (PWA) whereas the inelastic collisions are based upon the momentum dependent dynamic form factor S(q, w). For inelastic interactions with weakly bound valence electrons, S(q, w) is expressed in terms of the energy loss function Im {± ±1/e(q, w)} of the linear dielectric theory. On the other hand, generalized oscillator strengths (GOS) are chosen in case of excitation of tightly bound core level electrons. The electron energy range extends from several keV down to energies of about 10 eV, i.e. just above the vacuum level. Secondary electron (SE) creation and cascade processes have been included, where the SE transport has been treated in the same way as the scattering of the primary electrons.