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Molecular size effect in the chemical sputtering of a-C:H thin films by low energy H+, , and ions

✍ Scribed by P.R. Harris; F.W. Meyer; W. Jacob; T. Schwarz-Selinger; U. von Toussaint

Book ID: 108225844
Publisher: Elsevier Science
Year: 2011
Tongue: English
Weight: 435 KB
Volume: 269
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2010.12.071

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