✦ LIBER ✦
Molecular Dynamics Simulations of the Growth of Thin A-C:H Films Under Additional Ion Bombardment: Influence of the Growth Species and the Ar+ Ion Kinetic Energy
✍ Scribed by E. Neyts; M. Eckert; A. Bogaerts
- Publisher
- John Wiley and Sons
- Year
- 2007
- Tongue
- English
- Weight
- 497 KB
- Volume
- 13
- Category
- Article
- ISSN
- 0948-1907
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