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Molecular dynamics simulations of Ar[sup +] bombardment of Si with comparison to experiment

✍ Scribed by Humbird, David; Graves, David B.; Stevens, A. A. E.; Kessels, W. M. M.

Book ID: 121850121
Publisher: AVS (American Vacuum Society)
Year: 2007
Tongue: English
Weight: 566 KB
Volume: 25
Category: Article
ISSN: 0734-2101
DOI: 10.1116/1.2787713

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