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Molecular dynamics simulations of Ar[sup +] and Cl[sup +] impacts onto silicon surfaces: Distributions of reflected energies and angles

โœ Scribed by Helmer, B. A.


Book ID
121529184
Publisher
AVS (American Vacuum Society)
Year
1998
Tongue
English
Weight
850 KB
Volume
16
Category
Article
ISSN
0734-2101

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