Molecular dynamics simulations of Ar[sup +]-induced transport of fluorine through fluorocarbon films

✍ Scribed by Humbird, David; Graves, David B.; Hua, Xuefeng; Oehrlein, Gottlieb S.

• Book ID: 120572154
• Publisher: American Institute of Physics
• Year: 2004
• Tongue: English
• Weight: 437 KB
• Volume: 84
• Category: Article
• ISSN: 0003-6951
• DOI: 10.1063/1.1644338