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A molecular dynamics study of H radical bombardment of CH 3 : Si(1 0 0)— comparison of simulation and experiment

✍ Scribed by Végh, Joseph J; Graves, David B

Book ID: 127291959
Publisher: Institute of Physics
Year: 2009
Tongue: English
Weight: 528 KB
Volume: 42
Category: Article
ISSN: 0022-3727
DOI: 10.1088/0022-3727/42/22/222001

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