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Molecular dynamics simulation of ion implantation into hafnium dioxide

✍ Scribed by Huihui Ji; Min Yu; Hao Shi; Xiaokang Shi; Ru Huang; Xing Zhang; Jinyu Zhang; Kunihiro Suzuki; Hideki Oka

Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
342 KB
Volume
226
Category
Article
ISSN
0168-583X

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