Molecular dynamics study of B18H22 cluster implantation into silicon
✍ Scribed by Luis A. Marqués; Lourdes Pelaz; Iván Santos
- Publisher
- Elsevier Science
- Year
- 2007
- Tongue
- English
- Weight
- 833 KB
- Volume
- 255
- Category
- Article
- ISSN
- 0168-583X
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