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Molecular dynamics study of particle emission by reactive cluster ion impact

โœ Scribed by Takaaki Aoki; Jiro Matsuo

Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
337 KB
Volume
252
Category
Article
ISSN
0169-4332

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๐Ÿ“œ SIMILAR VOLUMES

Molecular dynamics study of the angular
Molecular dynamics study of the angular dependence of reactive cluster impacts
โœ Takaaki Aoki; Jiro Matsuo ๐Ÿ“‚ Article ๐Ÿ“… 2005 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 195 KB

The collisional processes of fluorine clusters impacting at various incident angles on bare silicon surfaces were studied, and the change of the surface profile, sticking probabilities of F atoms, sputtering yield and the distribution of the sputtered particles were examined. When a (F 2 ) 3 0 0 clu