๐”– Bobbio Scriptorium
โœฆ   LIBER   โœฆ

Molecular dynamics and Monte-Carlo simulation of sputtering and mixing by ion irradiation

โœ Scribed by T. Aoki; S. Chiba; J. Matsuo; I. Yamada; J.P. Biersack

Book ID
114164745
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
374 KB
Volume
180
Category
Article
ISSN
0168-583X

No coin nor oath required. For personal study only.

๐Ÿ“œ SIMILAR VOLUMES

Investigation of ion beam sputtering pro
Investigation of ion beam sputtering process by Monte Carlo simulation
โœ Michio Mizutani; Kimihiro Sasaki; Tomonobu Hata ๐Ÿ“‚ Article ๐Ÿ“… 1998 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 547 KB

A simulation of ion beam sputtering for Si and Ge is carried out and the simulation results are compared with the experimental ones. By analyzing each process, the validity of the simulation is investigated. The simulation results include the sputtering yield, energy distribution, ejected angle dist