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Modification of structure and properties of AZO thin film by introducing H2 in sputtering atmosphere at low substrate temperature

✍ Scribed by Zhu, B.L.; Li, K.; Wang, J.; Wu, J.; Zeng, D.W.; Xie, C.S.

Book ID
122241329
Publisher
Elsevier Science
Year
2013
Tongue
English
Weight
729 KB
Volume
64
Category
Article
ISSN
0749-6036

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## Abstract Transparent and conductive Al‐doped ZnO (AZO) films with thickness between 0.2 and 1.1 ΞΌm were deposited by sputtering at room temperature on glass and polyethylene terephthalate (PET) substrates. All films were polycrystalline with average crystallite size increasing when the film thic