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Modification of refractive index in silicon oxynitride films during deposition

โœ Scribed by R Machorro; E.C Samano; G Soto; F Villa; L Cota-Araiza


Book ID
117356016
Publisher
Elsevier Science
Year
2000
Tongue
English
Weight
91 KB
Volume
45
Category
Article
ISSN
0167-577X

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