Stable deposition of silicon oxynitride thin films with intermediate refractive indices by reactive sputtering

✍ Scribed by Yuki Nakanishi; Kazuhiro Kato; Hideo Omoto; Takao Tomioka; Atsushi Takamatsu

• Book ID: 113937340
• Publisher: Elsevier Science
• Year: 2012
• Tongue: English
• Weight: 434 KB
• Volume: 520
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/j.tsf.2011.10.052