Modelling of the angular distribution of sputtered particles from roughened elemental and alloy targets

✍ Scribed by Wang Zhenxia; Luo Wenyun; Wang Chuanshan; Wang Wenmin

• Publisher: Elsevier Science
• Year: 1996
• Tongue: English
• Weight: 841 KB
• Volume: 47
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/s0042-207x(96)00199-6

✦ Synopsis

A solid surface subjected to energetic ion bombardment generally develops characteristic structures, which may change the total and partial sputtering yields significantly.

The change is caused by several competing effects, for instance, change of the effective projectile incidence angle, recapture of obliquely ejected particles (shadowing effect), and element local-enrichment in different micro-regions on the alloy surface. In this article, we have developed a new theoretical method to take account of all the above effects. This method and its application to the analysis of experimental results for elemental (Cd) and alloy system (Al,-Sn,,,_,) targets is described in detail.