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Angular distribution of sputtered atoms from Al-Sn alloy and surface topography

โœ Scribed by Zhenxia Wang; Jisheng Pan; Jiping Zhang; Zhenlan Tao

Publisher
Springer
Year
1992
Tongue
English
Weight
482 KB
Volume
11
Category
Article
ISSN
0261-8028

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A solid surface subjected to energetic ion bombardment generally develops characteristic structures, which may change the total and partial sputtering yields significantly. The change is caused by several competing effects, for instance, change of the effective projectile incidence angle, recapture