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Sputtering of Cu and Zn atoms from elemental and alloy targets

✍ Scribed by M. Szymoński

Publisher
Springer
Year
1980
Tongue
English
Weight
319 KB
Volume
23
Category
Article
ISSN
1432-0630

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A solid surface subjected to energetic ion bombardment generally develops characteristic structures, which may change the total and partial sputtering yields significantly. The change is caused by several competing effects, for instance, change of the effective projectile incidence angle, recapture