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Apparatus for measurement of the angular distribution of particles sputtered from targets at high temperatures

✍ Scribed by HH Andersen; BJ Jeppesen; S Olesen; B Stenum; T Sørensen; HJ Whitlow

Publisher: Elsevier Science
Year: 1983
Tongue: English
Weight: 253 KB
Volume: 33
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(83)90661-9

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