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Modeling Si nanoprecipitate formation in SiO2layers with excess Si atoms

✍ Scribed by A. F. Leier; L. N. Safronov; G. A. Kachurin


Book ID
110120054
Publisher
Springer
Year
1999
Tongue
English
Weight
121 KB
Volume
33
Category
Article
ISSN
1063-7826

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