✦ LIBER ✦

Modeling of polysilicon diffusion sources during rapid optical annealing

✍ Scribed by F. Lau

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

The effect of arsenic fluence on the bor

✍ A. Merabet; J. Marcon 📂 Article 📅 2006 🏛 Elsevier Science 🌐 English ⚖ 189 KB

Phosphorus diffusion from a spin-on dope

✍ D. Mathiot; A. Lachiq; A. Slaoui; S. Noël; J.C. Muller; C. Dubois 📂 Article 📅 1998 🏛 Elsevier Science 🌐 English ⚖ 236 KB

Modeling of boron diffusion in polysilic

✍ Akif Sultan; Shubneesh Batra; Gayle E. Lux; Sanjay Banerjee 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 683 KB

Enhanced Diffusion of Impurities in Sili

✍ Aleksandrov, L. N. ;Bondareva, T. V. 📂 Article 📅 1991 🏛 John Wiley and Sons 🌐 English ⚖ 197 KB

Enhanced diffusion phenomena during rapi

✍ Guimarães, S. ;Landi, E. ;Solmi, S. 📂 Article 📅 1986 🏛 John Wiley and Sons 🌐 English ⚖ 645 KB

Investigating polysilicon thin film stru

✍ Ian Brazil; Martin A. Green 📂 Article 📅 2010 🏛 Springer US 🌐 English ⚖ 358 KB