Phosphorus diffusion from a spin-on doped glass (SOD) source during rapid thermal annealing

✍ Scribed by D. Mathiot; A. Lachiq; A. Slaoui; S. Noël; J.C. Muller; C. Dubois

• Publisher: Elsevier Science
• Year: 1998
• Tongue: English
• Weight: 236 KB
• Volume: 1
• Category: Article
• ISSN: 1369-8001
• DOI: 10.1016/s1369-8001(98)00045-6