✦ LIBER ✦

The effect of arsenic fluence on the boron diffusion in the polysilicon on monosilicon during rapid thermal annealing

✍ Scribed by A. Merabet; J. Marcon

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

The effects of scaling and rapid thermal

✍ N. Siabi-Shahrivar; H.A. Kemhadjian; W. Redman-White; P. Ashburn; J.D. Williams 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 210 KB

Modeling of boron diffusion in polysilic

✍ Akif Sultan; Shubneesh Batra; Gayle E. Lux; Sanjay Banerjee 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 683 KB

Effect of rapid thermal annealing on the

✍ G. Beshkov; N. Velchev; N. Tzenov; T. Milenov; V. Lazarova 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 202 KB

Effect of fluorine on boron thermal diff

✍ M.N. Kham; H.A.W. El Mubarek; J.M. Bonar; P. Ashburn 📂 Article 📅 2005 🏛 Elsevier Science 🌐 English ⚖ 358 KB

Effect of rapid thermal processing on th

✍ K. Masri; J.P. Boyeaux; S.N. Kumar; L. Mayet; G. Chaussemy; A. Laugier 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 790 KB

The effect of arsenic pressure on impuri

✍ L.J. Vieland 📂 Article 📅 1961 🏛 Elsevier Science 🌐 English ⚖ 374 KB