✦ LIBER ✦
Modeling of boron diffusion in polysilicon-on-silicon structures using a rapid thermal anneal step for ultra-shallow junction formation
✍ Scribed by Akif Sultan; Shubneesh Batra; Gayle E. Lux; Sanjay Banerjee
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 683 KB
- Volume
- 32
- Category
- Article
- ISSN
- 0921-5107
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